Stability of polymer-dielectric bi-layers for athermal silicon photonics
نویسندگان
چکیده
منابع مشابه
Stability of polymer-dielectric bi-layers for athermal silicon photonics.
Temperature sensitivity of Si based rings can be nullified by the use of polymer over-cladding. Integration of athermal passive rings in an electronic-photonic architecture requires the possibility of multi-layer depositions with patterned structures. This requires establishing UV, thermal and plasma stability of the polymer during multi-layer stacking. UV stability is enhanced by UV curing to ...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2012
ISSN: 1094-4087
DOI: 10.1364/oe.20.016059